发明名称 LONG-TERM ANNEALED INTEGRATED CIRCUIT ARRANGEMENTS AND METHOD FOR PRODUCING THE SAME
摘要 The invention inter alia relates to methods that allow removal of barrier material on a via board or a via cover by long-term annealing. Concurrently or alternatively thereto, the long-term annealing is a simple and straightforward method for coating tracks (106) with a barrier material (110).
申请公布号 WO2005106946(A1) 申请公布日期 2005.11.10
申请号 WO2005EP51808 申请日期 2005.04.22
申请人 INFINEON TECHNOLOGIES AG;AUBEL, OLIVER;HASSE, WOLFGANG;HOMMEL, MARTINA;KOERNER, HEINRICH 发明人 AUBEL, OLIVER;HASSE, WOLFGANG;HOMMEL, MARTINA;KOERNER, HEINRICH
分类号 H01L21/768;H01L23/522;H01L23/532 主分类号 H01L21/768
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