LONG-TERM ANNEALED INTEGRATED CIRCUIT ARRANGEMENTS AND METHOD FOR PRODUCING THE SAME
摘要
The invention inter alia relates to methods that allow removal of barrier material on a via board or a via cover by long-term annealing. Concurrently or alternatively thereto, the long-term annealing is a simple and straightforward method for coating tracks (106) with a barrier material (110).
申请公布号
WO2005106946(A1)
申请公布日期
2005.11.10
申请号
WO2005EP51808
申请日期
2005.04.22
申请人
INFINEON TECHNOLOGIES AG;AUBEL, OLIVER;HASSE, WOLFGANG;HOMMEL, MARTINA;KOERNER, HEINRICH
发明人
AUBEL, OLIVER;HASSE, WOLFGANG;HOMMEL, MARTINA;KOERNER, HEINRICH