| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a joint structure for connecting a quartz pipe and another pipe or quartz pipes to each other, properly coping with tapering or other deformation due to an etching phenomenon on the outer peripheral surface of the end part of the quartz pipe to prevent liquid leakage. <P>SOLUTION: This joint structure connects the quartz pipe and another pipe or the quartz pipes to each other. The joint structure includes: a joint body provided with a first step part formed on the inner peripheral surface to allow one end of the quartz pipe to be inserted; a fastening nut fitted to the outer peripheral surface of the quartz pipe and engaged with the end part of the joint body; a stopping means interposed between the fastening nut and the outer peripheral surface of the quartz pipe; and a first sealing means interposed between the joint body and the outer peripheral surface of the quartz pipe. The first sealing means is constructed by two or more stacked packing pieces having V-shaped section and first and second pressing adaptors clamping the packing pieces. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
