| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid sending method and an apparatus therefor which can accurately and stably filter the coating liquid and send the coating liquid to a coating means such as a coating head without a break in the coating. SOLUTION: The coating liquid sending method supplies the coating liquid L to a coating device 26 from a coating liquid tank 12. A plurality of coating liquid supply lines 14, (16) are formed by connecting liquid sending pumps 32, (42) and filters 34, 36, (44, 46) in series. The coating liquid supply lines can be connected to the coating liquid tank 12 and the coating device 26. Either one of the coating liquid supply lines 14, (16) is connected to the coating device for supplying the coating liquid. When the use of the line is stopped, communication of the line to the coating device is shut off and, almost simultaneously with it, the other line of the coating liquid supply lines is connected to the coating device for supplying the coating liquid. COPYRIGHT: (C)2006,JPO&NCIPI
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