TRANSMISSION FILTER DEVICE

摘要

The invention relates to a transmission filter device for position/dependent intensity filtering of an incident light distribution, comprising at least one delay device (23) which can be operated during transmission and which is used to produce a position dependent delay effect on the light of the incident light distribution. The delay device (23) can be controlled for the production of a temporal, variable, position/dependent delay effect. The inventive transmission filter device also comprises at least one polarisation filter arrangement (24) which is arranged in the light path behind the delay device. Said transmission filter device (22) is particularly suitable for use in illuminating systems of microlithographic projection arrangements such that the transmission filter effect can be adjusted in a temporally variable manner and can be synchronised according to the variations of the illumination settings of the illuminating system. A substrate illuminating method can be carried out in an advantageous manner according to the inventive illuminating system.