| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an image inspection processing dispensing with preprocessing for image alignment by performing image display of only a defective part and a different part of the image to be inspected together with its position. <P>SOLUTION: A computer 3 takes a reference image or a Fourier transform image of the reference image from a storage part or a CCD camera 1 or 2 to determine intensity information and phase information, and takes an image to be discriminated or a Fourier transform image of the image to be discriminated from the storage part or the CCD camera 1 or 2 to determine intensity information of the Fourier transform image of the image to be discriminated. The computer 3 takes the difference of the intensity information of the Fourier transform image between the reference image and the image to be discriminated, determines an inverse Fourier transform image of an expression by the differentiated intensity information and phase information of the reference image, and outputs the inverse Fourier transform image on an output part or a display part. An image defect of the image to be discriminated or the difference on the image between the reference image and the image to be discriminated is extracted as the difference between the image to be discriminated and the reference image by the inverse Fourier transform image. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
