发明名称 |
Systems and methods for forming apertures in microfeature workpieces |
摘要 |
Systems and methods for forming apertures in microfeature workpieces are disclosed herein. In one embodiment, a method includes directing a laser beam toward a microfeature workpiece to form an aperture and sensing the laser beam pass through the microfeature workpiece in real time. The method can further include determining a number of pulses of the laser beam and/or an elapsed time to form the aperture and controlling the laser beam based on the determined number of pulses and/or the determined elapsed time to form a second aperture in the microfeature workpiece. |
申请公布号 |
US2005247894(A1) |
申请公布日期 |
2005.11.10 |
申请号 |
US20040839457 |
申请日期 |
2004.05.05 |
申请人 |
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发明人 |
WATKINS CHARLES M.;HIATT WILLIAM M. |
分类号 |
B23K26/03;B23K26/04;B23K26/38;B23K26/40;G01N21/86;H01L21/76;H01L21/768;H05K3/00;(IPC1-7):H01L21/76 |
主分类号 |
B23K26/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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