METHOD OF FORMING PROJECTION CONSISTING OF MATERIAL CONTAINING CARBON, PLATE BOARD PRODUCT HAVING PROJECTION CONSISTING OF MATERIAL CONTAINING CARBON, AND ELECTRON EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a projection consisting of a material containing carbon, a plate board product having a projection consisting of materials containing the carbon, and an electron emitting element.

SOLUTION: This is the method in which a mask 23 is formed having a plurality of patterns 23a arranged on a plate board 11 by respectively conducting etching 21 on a plurality of mask membranes formed on the plate board 11 having a region consisting of the material containing the carbon. Etching is conducted on the plate board 11 by using this mask 23 to form projections 11c respectively corresponding to a plurality of patterns 23a of the mask 23. Respective patterns 23a include a first mask layer 13a and a second mask layer 15a deployed in the direction to intersect with the main face 11a. Materials of the first mask layers 13a are different from those of the second mask layers 15a. In respective patterns 23a, size of the first mask layer 13a is different from that of the second mask layer 15a.

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