| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting structure for a fluid control valve in a semiconductor manufacturing process enabling to reduce installation area, making a screw 24 not roll easily in a shop to improve workability, preventing external leak of fluid by securing sealability of an installation surface, not requiring confirmation work of operation and sealability at a time of replacement of the fluid control valve 13, enabling to assemble a fluid control valve mounting structure by work from one direction, and keep the number of screws necessary for assembly in two. SOLUTION: This fluid control valve attachment structure is for assemblying a valve main element 21 and a pilot part 2, and includes a screw 23 having a through hole 41 formed in a nominal length direction and a screw 24 passing through the through hole 41 and assembling the fluid control valve 13 and a flow passage block 12. COPYRIGHT: (C)2006,JPO&NCIPI
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