COAXIAL WAVEGUIDE MICROSTRUCTURES AND METHODS OF FORMATION THEREOF

摘要

Coaxial waveguide microstructures are provided. The microstructures include a substrate (2) and a coaxial waveguide disposed about the substrate. The coaxial waveguide includes: a center conductor (20); an outer conductor including one or more walls (4, 10, 18, 24, 28), spaced apart from and disposed around the center conductor; one or more dielectric support members (12') for supporting the center conductor in contact with the center conductor and enclosed within the outer conductor; and a core volume (30) between the center conductor and the outer conductor, where the core volume is under vacuum or in a gas state. Also provided are methods of forming coaxial waveguide microstructutres by sequentially building processes and hermetic packages which include a coaxial microstructure.