METALLIC THIN FILM PIEZORESISTIVE TRANSDUCTION IN MICROMECHANICAL AND NANOMECHANICAL DEVICES AND ITS APPLICATION IN SELF-SENSING SPM PROBES
摘要
Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
申请公布号
WO2005103604(A2)
申请公布日期
2005.11.03
申请号
WO2005US13101
申请日期
2005.04.15
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY;TANG, HONGXING;LI, MO;ROUKES, MICHAEL, L.