The invention relates to an FET-based gas sensor comprising a gas channel for diffusing a measuring gas to a gas-sensitive layer which is actively connected to a FET for signal readout. According to the invention, an electrochemical element is at least partially inserted into the gas channel for the electrochemical conversion of interfering gases. The arrangement is permeable to the target gas.
申请公布号
WO2005103666(A1)
申请公布日期
2005.11.03
申请号
WO2005EP04278
申请日期
2005.04.21
申请人
SIEMENS AKTIENGESELLSCHAFT;FLEISCHER, MAXIMILIAN;MEIXNER, HANS;SIMON, ELFRIEDE;LAMPE, UWE;POHLE, ROLAND
发明人
FLEISCHER, MAXIMILIAN;MEIXNER, HANS;SIMON, ELFRIEDE;LAMPE, UWE;POHLE, ROLAND