MEMS DEVICE WITH CONDUCTIVE PATH THROUGH SUBSTRATE
摘要
A MEMS device has at least one conductive path extending from the top facing side of its substrate (having MEMS structure) to the bottom side of the noted substrate. The at least one conductive path extends through the substrate as noted to electrically connect the bottom facing side with the MEMS structure.
申请公布号
WO2005102911(A1)
申请公布日期
2005.11.03
申请号
WO2005US12939
申请日期
2005.04.14
申请人
ANALOG DEVICES, INC.;HARNEY, KIERAN, P.;FELTON, LAWRENCE, E.;NUNAN, THOMAS, KIERAN;ALIE, SUSAN, A.;WACHTMANN, BRUCE
发明人
HARNEY, KIERAN, P.;FELTON, LAWRENCE, E.;NUNAN, THOMAS, KIERAN;ALIE, SUSAN, A.;WACHTMANN, BRUCE
