发明名称 |
HERSTELLUNGSVERFAHREN EINES MAGNETKOPFES |
摘要 |
Following the deposition of an insulation layer, a patterned P2 pole tip seed layer is deposited. Significantly, the pole tip seed layer is not deposited beneath the induction coil area of the magnetic head. A dielectric layer is next deposited and a patterned RIE etching mask that includes both a P2 pole tip trench opening and an induction coil trench opening is fabricated upon the dielectric layer. Thereafter, in a single RIE etching step, the P2 pole tip trench is etched through the dielectric material down to the seed layer, and the induction coil trench is etched through the dielectric material down to the insulation layer. The P2 pole tip is first electroplated up into its trench, an induction coil seed layer is next deposited, and the induction coil is then electroplated up into the induction coil trench. |
申请公布号 |
DE60201914(T2) |
申请公布日期 |
2005.11.03 |
申请号 |
DE2002601914T |
申请日期 |
2002.05.29 |
申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V., AMSTERDAM |
发明人 |
HSIAO, RICHARD;SANTINI, ALBERTO |
分类号 |
G11B5/012;G11B5/17;G11B5/31;(IPC1-7):G11B5/31 |
主分类号 |
G11B5/012 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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