发明名称 |
METHOD AND SYSTEM FOR FASTENING COMPONENTS USED IN PLASMA PROCESSING |
摘要 |
<p>A fastening component for fastening together a first component and a second component used in a plasma processing tool. The fastening component includes a first surface configured to be exposed to plasma processing performed in the plasma processing tool, and a second surface configured to contact the first component. Also included is a stem extending from the second surface and configured to at least partially protrude through the first component and the second component. The fastening component further includes a locking pin extending from at least one side of the stem and configured to contact the second component. The first surface, the second surface, the stem, and/or locking pin are made of or coated with a material that is highly resistant to erosion resulting from plasma processing.</p> |
申请公布号 |
WO2005103507(A1) |
申请公布日期 |
2005.11.03 |
申请号 |
WO2005US03023 |
申请日期 |
2005.01.27 |
申请人 |
TOKYO ELECTRON LIMITED;FINK, STEVEN, T. |
发明人 |
FINK, STEVEN, T. |
分类号 |
F16B5/10;F16B21/00;F16B21/02;(IPC1-7):F16B21/00 |
主分类号 |
F16B5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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