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发明名称
LITHOGRAPHIC APPARATUS COMPRISING A GAS FLUSHING SYSTEM
摘要
申请公布号
SG115613(A1)
申请公布日期
2005.10.28
申请号
SG20040000556
申请日期
2004.02.10
申请人
ASML NETHERLANDS B.V.
发明人
DE BOKX, PIETER KLAAS;VAN EMPEL, TJARKO ADRIAAN RUDOLF;HULTERMANS, RONALD JOHANNES;JONKERS, ADRIANUS CORNELIUS ANTONIUS
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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