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发明名称
Cvd deposition of hf and zr containing oxynitride films
摘要
申请公布号
EP1479790(B1)
申请公布日期
2005.10.26
申请号
EP20040011822
申请日期
2004.05.18
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
LOFTIN, JOHN D.;CLARK, ROBERT DANIEL;HOCHBERG, ARTHUR KENNETH
分类号
C23C16/44;C23C16/30;C23C16/455;H01L21/314;H01L21/318;(IPC1-7):C23C16/30
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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