| 摘要 |
<P>PROBLEM TO BE SOLVED: To heighten the workability in performing the work for inspecting contamination of a dustproof net and the work for cleaning the contaminated dustproof net. <P>SOLUTION: An upper dustproof net 22 is removably fitted to a recessed part 20B provided on the outside surface 20A of a right upper surface cover 20 using a bolt 25, and a lower dustproof net 26 is removably fitted to a recessed part 21B provided on the outside surface 21A of a right lower surface cover 21 using a bolt 29. Thus, the contamination degrees of the upper dustproof net 22 and the lower dustproof net 26 can be easily inspected from the outer surfaces of the right upper surface cover 20 and the right lower surface cover 21. Further, only the upper dustproof net can be removed from the right upper surface cover 20, and only the lower dustproof net 26 can be removed from the right lower surface cover 21, whereby in cleaning the contaminated upper dustproof net 22 and lower dustproof net 26, the work efficiency can be heightened. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
