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发明名称
METHOD FOR FORMING A CONTACT HOLE IN A SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100523618(B1)
申请公布日期
2005.10.24
申请号
KR20020086347
申请日期
2002.12.30
申请人
发明人
分类号
H01L21/28;H01L21/425;H01L21/44;H01L21/4763;H01L21/768;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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