发明名称 ADHESIVE CHUCK DEVICE
摘要 <p>A board is surely mounted and removed by a simple structure. On a board side of a holding plate (1), an adhesive member (3) for adhering and holding a board (A) by facing a rear plane (A1) of the board, and a deforming film (4) which can deform by protruding and receding in a direction crossing a plane (1a) on the board side are provided. An adhesive surface (3a) of the adhesive member (3) and the board (A) are abutted and adhered by the protruding and receding deformation of the deforming film (4), and the board (A) is peeled from the adhesive surface (3a) of the adhesive member (3) without difficulty by forcibly separating the both.</p>
申请公布号 WO2005098522(A1) 申请公布日期 2005.10.20
申请号 WO2005JP06925 申请日期 2005.04.08
申请人 SHIN-ETSU ENGINEERING CO., LTD.;OHTANI, YOSHIKAZU;YOKOTA, MICHIYA 发明人 OHTANI, YOSHIKAZU;YOKOTA, MICHIYA
分类号 B65G49/06;G02F1/13;G02F1/1333;H01J11/20;H01J11/44;H01L21/683;(IPC1-7):G02F1/13 主分类号 B65G49/06
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