CONDENSING APPARATUS OF VOLATILIZED VAPOR AND RECOVERING METHOD OF VOLATILIZED VAPOR IN THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a condensing apparatus of volatilized vapor having a vacuum pump keeping vacuum in a system generating volatilized vapor in vacuum, and a condensing means for recovering volatilized vapor by condensing it in a vacuum atmosphere. SOLUTION: This condensing apparatus of volatilized vapor is provided, in a system generating volatilized vapor in vacuum, with the vacuum pump keeping vacuum and a first condensing means recovering the volatilized vapor by condensing it, and a second condensing means at the outlet of the vacuum pump. The second condensing means is provided so as to operate in an atmospheric pressure. Water of room temperature is used as cooling water of the second condensing means. A dry vacuum pump is used as the vacuum pump. COPYRIGHT: (C)2006,JPO&NCIPI