Production method for photoresist master, production method for optical recording medium-producing stamper, stamper, phtoresist master, stamper intermediate element and optical recroding medium

摘要

A stamper ( 36 ) used for fabricating an optical recording medium is fabricated by forming a convexo-concave pattern ( 22 ) without development of a photoresist layer ( 16 ). A fabrication method of the stamper used for fabricating an optical recording medium includes: forming a light-absorbing layer ( 14 ) and the photoresist layer ( 16 ) on a glass substrate ( 10 ); forming the convexo-concave pattern ( 22 ) of undeveloped photoresist by irradiating the photoresist layer ( 16 ) with laser light from a surface of the photoresist layer that is opposite to the light-absorbing layer ( 14 ) so as to remove a part of the photoresist layer by energy of the laser light, thereby fabricating a photoresist master ( 26 ); forming a metal thin layer ( 28 ) on the convexo-concave pattern ( 22 ) in the photoresist master ( 26 ); forming a metal layer ( 30 ) on the metal thin layer ( 28 ) by electro-plating; and forming the stamper ( 36 ) by separating the metal thin layer ( 28 ) and the metal layer ( 30 ) from the photoresist master ( 26 ).