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发明名称
Abtastbelichtungsvorrichtung
摘要
申请公布号
DE69434080(T2)
申请公布日期
2005.10.20
申请号
DE19946034080T
申请日期
1994.06.10
申请人
NIKON CORP., TOKIO/TOKYO
发明人
NISHI, KENJI;SUZUKI, KAZUAKI
分类号
G03F7/207;G03F7/20;(IPC1-7):G03F7/20
主分类号
G03F7/207
代理机构
代理人
主权项
地址
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