| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve maintainability of a plasma generator and to extend each service life of a first anode and a second anode being its components. <P>SOLUTION: This plasma generator is so structured that a cathode 16, the anodes 21A' and 21B' and a tubular shield body 22 are installed in a discharge chamber; and electrons in plasma formed in the discharge chamber are radiated into a vacuum vessel outside the discharge chamber through a hole part of the shield body 22. The second anode 21B' is formed into a two-step cylindrical shape, and the outside surface of a small cylinder part Q inserted into the first anode 21A' is kept in curved-surface finish. A hole part P of the cylindrical first anode 21A is formed into a two-step shape comprising a shallow hole part PA and a deep hole part PB, and semi-cylindrical grooves 23A, 23B, 23C and 23D are axially formed at equal intervals on the circumferential surface of the deep hole part PB. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
