| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for measuring the sticking position of a pellicle for a photomask with a pellicle, by which measurement accuracy and measurement reproducibility can be enhanced without damaging or depositing a foreign matter on the photomask or the pellicle by eliminating the variation of measurement caused by measuring persons when the accuracy of the sticking position of a pellicle in a photomask with a pellicle is measured. <P>SOLUTION: The apparatus for measuring the sticking position of the pellicle is composed of: a measuring unit 10 comprising at least a mounting jig 12 disposed at least on a rotating stage 11 and a non-contact distance measuring machine 15; a determination/control unit 20 which acquires the measurement date obtained by the measuring unit and determines whether the data is within a preliminarily determined reference or not or controls the operation/carrying of a photomask with a pellicle; a transfer unit 30 to transfer the photomask with a pellicle between processes; and a case inlet port 40 . <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
