METHOD FOR MEASURING POWER IN A TRANSFORMER COUPLED PLASMA SOURCE

摘要

An apparatus for providing a direction estimation of the power delivered to the plasma in a TCP source includes a vacuum chamber (410), an electrical transformer (330) to induce an electromagnetic field within the vacuum chamber (410). The transformer (310) includes a primary winding (300) a second winding formed by the plasma loop (320). The apparatus also includes a current transformer (330) to measure the current flow through the plasma loop (320).