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发明名称
METHODS OF FORMING ALPHA AND BETA TANTALUM FILMS WITH CONTROLLED AND NEW MICROSTRUCTURES
摘要
申请公布号
CA2567032(A1)
申请公布日期
2005.10.13
申请号
CA20052567032
申请日期
2005.03.24
申请人
NORTH CAROLINA STATE UNIVERSITY;H.C. STARCK, INC.
发明人
KUMAR, PRABHAT;NARAYAN, JAGDISH;WU, RICHARD
分类号
B81C1/00;C23C14/16;C23C14/54;C23C16/06;C30B23/00;C30B25/00;C30B29/02
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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