| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coil 20 that is used for the actuator, namely, a positioning device of a lithographic projector and is improved in heat transferring property. <P>SOLUTION: The positioning device includes a planar motor having a stator and a translational unit, and either one of the stator and translational unit includes a periodic magnetic structure. In addition, the other one of the stator and translational unit includes a plurality of coils which can transmit electric current. The coil 20 is formed of a strip 21 composed of a long and narrow conductive metal plate wound around a winding axis 22. The turns of the strip 21 composed of the long and narrow metal plate are separated from each other by nonconductive layers 25. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
