| 摘要 |
PROBLEM TO BE SOLVED: To transfer a board in a higher levelness by a transferring arm of the transferring mechanism of a board processing device with a plurality of processing chamber connected to a transferring chamber with the transferring mechanism provided. SOLUTION: When transferring the board to a vacuum processing chamber connected to the transferring chamber by the transferring arm supported by the base susbtance provided at a bottom of the vacuum transferring chamber, for instance, an inclination of the transferring arm is detected with the use of sensors and adjusted by an inclination-adjusting mechanism on the basis of the detected result. This constitution can transfer the board in the higher levelness even if, for instance, an accessing range of the transferring arm is wider. COPYRIGHT: (C)2006,JPO&NCIPI
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