发明名称 APPLICATION METHOD FOR DROPLET AND APPLICATION APPARATUS FOR DROPLET
摘要 <P>PROBLEM TO BE SOLVED: To provide an application method for droplets and an application apparatus for droplets capable of eliminating waste of coating liquid which forms a liquid film on a substrate and easily obtaining a uniform coated surface. <P>SOLUTION: This is the application apparatus for droplets in which a microquantity of viscous liquid 12 is discharged from the tip of a nozzle 11 in the state of non-stopping, the discharged liquid 12 contacts a substrate 50 which is positioned under the nozzle 11, and the liquid 12 which is discharged by horizontal movement of the substrate 50 is pulled by the substrate 50 and is disconnected from the nozzle 11 so that the liquid which has turned to be a droplet 13 on the substrate 50 keeps dripped down. And this is the application method for droplets dripping a plurality of droplets on the substrate 50 at a prescribed interval so that the droplets which are dripped down on the substrate 50 spread with wetting and form a membrane. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005279628(A) 申请公布日期 2005.10.13
申请号 JP20040168580 申请日期 2004.06.07
申请人 CKD CORP;OKUTEKKU:KK 发明人 OKUMURA KATSUYA;OZAWA YUKIO;BANDO HIROSHI;ITO KAZUHISA;ITO SHIN;SATO RIYUUTETSU
分类号 G03F7/16;B05C5/00;B05C13/02;B05D1/26;B05D3/00;H01L21/027 主分类号 G03F7/16
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