| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of stable drive by increasing a displacement amount of a movable part, even if a low voltage is applied. SOLUTION: The electrostatic actuator comprises the movable part which swings by centering a swinging shaft on at least a semiconductor substrate, a fixing part formed at a position facing the movable part, and a stopper part formed on a movable part moving line. The electrostatic actuator also comprises an electrode part formed on the movable part by forming a contact part for conducting a mirror part, the electrode part and the semiconductor substrate on the movable part, and a drive means for swinging the swinging shaft as a center along the upper face of the semiconductor substrate, by generating electrostatic force between the electrode part and an electrode part formed on the fixing part provided on a facing part. COPYRIGHT: (C)2006,JPO&NCIPI
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