| 摘要 |
PROBLEM TO BE SOLVED: To control a time schedule, e.g. to shorten the time schedule, without running the risk of production shutdown due to a failure of a conveyance system. SOLUTION: The semiconductor production system comprises a plurality of manufacturing apparatus 10, a wafer transfer robot 18 provided for each manufacturing apparatus 10 in order to convey a semiconductor wafer processed by each manufacturing apparatus 10, and a wafer port 16 coupling one wafer transfer robot 18 with other wafer transfer robot 18 in order to mount the processed semiconductor wafer. The semiconductor production system is arranged such that one wafer transfer robot 18 mounts the semiconductor wafer on the wafer port 16 and other wafer transfer robot 18 receives the semiconductor wafer from the wafer port 16. COPYRIGHT: (C)2006,JPO&NCIPI
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