METHOD OF FORMING THIN FILM OF SEMICONDUCTOR DEVICE,申请号KR20030020786-传众专利搜索

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发明名称	METHOD OF FORMING THIN FILM OF SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100520821(B1)	申请公布日期	2005.10.13
申请号	KR20030020786	申请日期	2003.04.02
申请人		发明人
分类号	H01L21/20;B05D5/00;C23C16/40;H01L21/302;H01L21/314;H01L21/461;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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