ANGULAR VELOCITY SENSOR

摘要

The present invention aims to improve detection characteristics of an angul ar velocity sensor using a tuning fork vibrator made of a single crystalline piezoelectric material such as quartz. In order to achieve this object, the present invention directly bonds two vibrators (20) and (30) in the thickness direction for an integral structure so that the vibrators have a crystal axis that generate piezoelectric phenomena in inverse polarities in their width directions. Tuning fork vibrator (10) has two tuning fork arms (10a) and (10b) and tuning fork base (10c). Detection electrodes (6), (7), (5), and (8) are disposed on an inner face and outer fa ce of both tuning fork arms (10a) and (10b). Drive electrodes (1) and (2) are disposed on both tunings fork arms (10a) and (10b) against detection electrodes (5), (6), (7) , and (8) for canceling capacitive coupling from a drive section to detecting section.