| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus capable of preventing deterioration of quality by cleaning work pieces without adhesion of soil, e.g. fat and oil thereto, and cleaning at low costs owing to the possibility of recycle of a cleaning solution. SOLUTION: This apparatus is for cleaning the work piece 1 in a cleaning vessel 2 and has a heating section 3 heating the cleaning solution in the vessel to evaporate so that the work piece 1 can be charged in the vessel in a condition without contact with the cleaning solution before evaporation, and so that the cleaning solution evaporated by heating with the heating section 3 can come into contact with the work piece 1 to clean the work piece 1. COPYRIGHT: (C)2006,JPO&NCIPI
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