发明名称 OSCILLATING BODY, SLIDE FACE POLISHING DEVICE AND SLIDE FACE POLISHING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an oscillating body of which the slide face is formed into an arc shape having a curvature at which stable drive is obtained. <P>SOLUTION: The oscillating body 20 has a plurality of protrusions 4, and transmits an excited oscillation in a sending direction to a moving body 12 that contacts with the slide face 3 at the tip of the protrusion 4. A curvature in the sending direction of the moving body of the slide face 3 of the tip of the protrusion 4 is almost equal to a curvature in the vicinity of the belly of a neutral face parallel curve, and set to a value that coincides with or is slightly larger than a curvature at the maximum amplification of a drive oscillation. The curvature of the slide face 3 is not larger than ten times of the curvature of the neutral face parallel curve at a drive limit minimum amplification. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005278336(A) 申请公布日期 2005.10.06
申请号 JP20040090022 申请日期 2004.03.25
申请人 CANON INC 发明人 MORI TAKAO
分类号 H01L41/09;H02N2/00 主分类号 H01L41/09
代理机构 代理人
主权项
地址