| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain accurate intensity distribution of the electric signal of an electron beam while preventing an impact exerted by a signal generated by an electron input to a sensor or the like other than an electron beam gauge head upon the output signal of the electron beam gauge head of such as an electron beam detector, and a measuring instrument of the intensity distribution of the electron beam. <P>SOLUTION: The measuring instrument 90 of the intensity distribution of the electron beam includes an electron beam detecting means 80 which outputs the signal showing intensity of the irradiated electron beam 15, a shielding means 94 which shields the electron beam detecting means 80 from the electron beam 15, a storage means 91 which stores the output signal of the electron beam detecting means 80 shielded from the electron beam 15 by the shielding means 94, a comparing means 92 which outputs a differential signal between the output signal of the electron beam detecting means 80 to which the electron beam 15 is irradiated and the stored output signal, and a generating means 93 of the intensity distribution which generates the intensity distribution of the electron beam based on the differential signal by the comparing means 92. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
