| 摘要 |
PROBLEM TO BE SOLVED: To attain the reduction of packaging costs based on the advantage of mass-production by making a substrate common regardless of the specification of a planar electromagnetic actuator, and to effectively utilize components by exchanging only a main component even when the component is damaged or defective. SOLUTION: The planar electromagnetic actuator is comprised of: a planar electromagnetic actuator chip wherein a planar movable plate and a torsion bar for pivotally supporting the movable plate so that the movable plate turns in the vertical direction of a semiconductor substrate, are integrally formed at least on the semiconductor substrate, and a mirror and a driving coil for generating a magnetic field are formed on the movable plate; and a pair of an magneto-static field generating means, and a yoke for operating a magnetic field upon the driving coil on the counter side of the movable plate disposed in parallel with the axial direction of the torsion bar in the planar electromagnetic actuator chip, and the planar electromagnetic actuator is comprised of a first substrate with the planar electromagnetic actuator chip packaged thereon and a second substrate with the permanent magnet and the yoke packaged thereon. Furthermore, the first substrate and the second substrate are attachably and detachably fixed. COPYRIGHT: (C)2006,JPO&NCIPI
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