Determination of the deflection of micro mirrors in a projection system

摘要

The system has a laser light source for generating a beam of light that is to be projected. The light beam is projected through a mirror (1) that can be swung. A light barrier (3) is provided for ascertaining the position of mirror. The mirror has a pivot (2) at its backside, where the pivot is used for interacting with the barrier. A reflecting mirror plate is hung using torsion springs on a frame that surrounds a surface of mirror.