发明名称 |
SUBSTRATE DIVIDING APPARATUS AND METHOD FOR DIVIDING SUBSTRATE |
摘要 |
A substrate dividing apparatus for dividing a substrate comprises a scribe line forming means for forming a scribe line on a substrate and a breaking means for breaking the substrate along the scribe line. The breaking means includes a means which makes a vertical crack under the scribe line extend in the thickness direction of the substrate by spraying a heated fluid onto the scribe line formed on the substrate, which fluid has a temperature high enough to have the substrate expand. |
申请公布号 |
KR20050095912(A) |
申请公布日期 |
2005.10.04 |
申请号 |
KR20057014009 |
申请日期 |
2005.07.29 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. |
发明人 |
NISHIO YOSHITAKA |
分类号 |
B28D5/00;C03B33/027;C03B33/033;C03B33/04;C03B33/09;C03B33/10 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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