| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device that can efficiently propagate an electromagnetic wave. <P>SOLUTION: The plasma treatment device treats an object to be treated with plasma by generating the plasma in a vacuum vessel 4 by introducing the electromagnetic wave generated from a high-frequency power source into an electromagnetic wave radiating rectangular waveguide through an electromagnetic wave distributing rectangular waveguide 21, and, at the same time, radiating the electromagnetic wave into the vessel 4 through the slot of a slotted plate 14. The electromagnetic wave distributing rectangular waveguide 21 and electromagnetic wave radiating rectangular waveguide are connected to each other through a hollow third electromagnetic wave transmission line which is formed so that its internal size may become smaller toward the transmission side of the electromagnetic wave. In addition, a dielectric member 42 having a wedge-like shape and arranged to be expanded toward the transmission side is provided in the third electromagnetic wave transmission line. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
