摘要 |
<P>PROBLEM TO BE SOLVED: To achieve the increase of the density of wirings, by reducing the positioning manhours of the wirings when forming the wirings of the interlayer electrodes of a piezoelectric element. <P>SOLUTION: With respect to the laminated piezoelectric element wherein piezoelectric-element layers and electrode layers are laminated alternately and the wirings interposed connectively between the electrode layers are formed, the piezoelectric-element layers, the electrode layers, and the wirings are deposited formatively by using an aerosol method. Also, each wiring is deposited in the form of a plane vertical to the piezoelectric-element layers and the electrode layers, and is so formed as to make linear its contacting portion with the electrode layers. <P>COPYRIGHT: (C)2005,JPO&NCIPI |