Forming method of contact in semiconductor device and manufacturing method of PMOS device using the same

摘要

The present invention provides a manufacturing method of a contact for use in a semiconductor device and a manufacturing method of a PMOS device using the same, which can obtain an electrical characteristic of a low contact resistance similar to a mixed implantation of ₄₉BF₂⁺ ions and ₁₁B⁺ ions and reduce a manufacturing cost. The method for forming a contact of a semiconductor device includes: the steps of: forming an insulating layer on a conductive semiconductor layer; forming a contact hole within the insulating layer to expose a portion of the conductive semiconductor layer; forming a plug implantation region by implanting ₃₀BF⁺ ions into the exposed conductive semiconductor layer disposed on a bottom of the contact hole; performing an annealing process for activating dopants injected by the implantation of ₃₀BF⁺ ions; and filling the contact hole with a conductive layer.