SUBSTRATE STORING CONTAINER

摘要

A substrate storing container is provided to safely transport, fix and store a substrate, not loosening a threaded member even with a load applied on an attaching member of the substrate storing container and in a heating process for cleaning and drying the substrate storing container, at the time of transporting the substrate by storing it and fixing the substrate to substrate processing equipment. The substrate storing container is composed of a container main body (1) and a cover (2). For fastening the attaching member (6), such as a side plate to be attached to the substrate storing container for transportation and a bottom plate for positioning on the substrate processing equipment, by using the threaded member (3), a loosening preventing means is provided between the threaded member (3) and an engaging plane of the attaching member (6) so as to prevent the threaded member (3) from loosening.