| 摘要 |
<p>A liquid chemical supplying machine is provided with a hollow piston (15), a bellows (12) which has a large bellows part (16) on one side of the hollow piston and a small bellows part (17) on the other side, and a cylinder tube (11) which has an inner circumferential surface (11a) for guiding the outer peripheral surface of the hollow piston (15) and housing the bellows (12). A pump chamber (20) is provided on the inner side of the bellows (12). On the both sides of the hollow piston (15), a working chamber (43) for giving thrust toward the small bellows part (17) to the hollow piston (15) and a working chamber (44) for giving thrust toward the large bellows part (16) to the hollow piston (15) are provided. When the working chambers (43 and 44) are selectively supplied with a fluid, the hollow piston (15) reciprocates in the axial direction, and the pump chamber (20) expands and contracts in the horizontal direction. When the pump chamber (20) expands, liquid chemicals are sucked into the pump chamber (20), and when it contracts, the liquid chemicals are discharged from the pump chamber (20).</p> |
