| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement device and method for measuring a charge quantity generated when peeling a protective film from a bonded object. SOLUTION: This measuring device has a metal sheet for laying the bonded object and the protective film, and a coulomb meter connected thereto by a conductive wire to measure the charge quantity, and the metal sheet measures in order the charge quantity generated when peeling the protective film from the bonded object on an insulation body. In this measuring method, the charge quantity generated when peeling the protective film is measured by the coulomb meter by laying the bonded object and the protective film bonded to the metal sheet, using the measuring device. COPYRIGHT: (C)2005,JPO&NCIPI
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