| 摘要 |
PROBLEM TO BE SOLVED: To decrease the number of production steps of a water-repellent structure having fine irregularity form. SOLUTION: When Al is deposited by 8,000-10,000Åon the upper surface of a protrusion forming film 11 composed of SiO<SB>2</SB>by sputtering, crystal grains of Al grow greatly and the surface becomes irregular thus forming a surface irregular layer 12 having protrusions 12a. When the surface irregular layer 12 and the protrusion forming film 11 are etched continuously by anisotropic dry etching, irregularities corresponding to those on the surface of the surface irregular layer 12 are formed on the upper surface side of the etched protrusion forming film 11. In this regard, the number of production steps can be decreased as compared with that of photolithography method. When a water-repellent film is formed on the surface of the protrusions and recesses thus obtained, a water-repellent structure having fine irregularity form can be obtained. COPYRIGHT: (C)2005,JPO&NCIPI
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