发明名称 Actuator coil cooling system
摘要 An actuator coil with a race track winding that generates a magnetic field. A cooling tube has cooling liquid flowing therethrough and is wrapped around a periphery of said race track winding. A plurality of thermal conductive strips are arranged generally transverse to at least portions of said race track winding so as to conduct heat from said racetrack winding to said cooling tube.
申请公布号 US6946761(B2) 申请公布日期 2005.09.20
申请号 US20030680290 申请日期 2003.10.08
申请人 ASML HOLDING, N.V. 发明人 GALBURT DANIEL N.
分类号 H02K9/19;H02K9/22;H02K41/02;H02K41/03;(IPC1-7):H02K9/00 主分类号 H02K9/19
代理机构 代理人
主权项
地址