| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a nonlinear element by reducing weight by using a plastic substrate and preventing deformation in the substrate in processing. SOLUTION: When forming the nonlinear element (for example TFD 13) on the flexible plastic substrate 10, first a wiring film 141 for energization for anode oxidization is formed in a line on the plastic substrate 10 by using a mask sputtering method and a droplet discharge method. In this case, as a material of the wiring film 141, a material that can be subjected to anode oxidization and has small film stress, such as a conductive material containing a valve metal such as aluminum, is used. Then, a plurality of electrode films 142 that form the body of the lower electrode of TFD 13 are formed along the line on the surface of the wiring film 141, by using the mask sputtering method and the droplet discharge method. Then, the surface of each electrode film 142 is subjected to anode oxidization collectively by using the wiring film 141, and an upper electrode 11 in the TFD 13 is formed on the surface of an obtained anode oxide film 18. COPYRIGHT: (C)2005,JPO&NCIPI |
