| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device generating a plurality of electron beams at each light axis, for example four electron beams, with relatively large current at each electron beam. SOLUTION: The electron beam device comprises an electron beam discharging part (32) having an electron gun (30). The electron gun (30) is arranged along a light axis (23), and discharges a plurality of peripheral electron beams at the periphery of the light axis (23) in the direction having a prescribed angle to the light axis (23). The electron beam device is provided with a plurality of openings (34) located at the part sifted from the light axis (23), and a magnetic lens (7) forming a magnetic field between the electron gun (30) and the opening (34), and controlling the peripheral electron beams so that the plurality of peripheral electron beams discharged from the electron gun (30) pass through the opening (34). COPYRIGHT: (C)2005,JPO&NCIPI
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