发明名称 Aksellerasjonssensor og fremgangsmate for registrering av skrastilling
摘要 In an acceleration sensor detecting inclined displacement of a predetermined article from a basic position, the acceleration sensor (10) includes a sensor chip having a detection plane including one detection axis or two crossing detection axes detecting the inclined displacement. An axis orthogonal to the detection plane of the sensor chip is disposed in parallel with a standard plane of the article in the basic position. Then, the sensor chip obtains an output signal according to the inclined displacement of the standard plane. <IMAGE>
申请公布号 NO20054191(D0) 申请公布日期 2005.09.09
申请号 NO20050004191 申请日期 2005.09.09
申请人 TOKYO ELECTRON LTD 发明人 HARADA MUNEO;IKEUCHI NAOKI;HASHIMOTO HIROYUKI
分类号 G01C9/06;G01C9/08;G01P15/12;G01P15/18 主分类号 G01C9/06
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